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99.7% Alumina Wafer Polish Plate

Application

As the Alumina ceramic wafer polishing and sapphire lapping disks used in the semi-conductive, diamond polishing etc. Process: All types of Polishing and lapping process, such as CMP chemical mechanical polishing, Mechanical Polishing, Precision Polishing.

Feature

High purity and chemical durability High Mechanical Strength and Hardness High Corrosion Resistance High Voltage Resistance High Temperature Resistant Up to 1700ºC Extremely Abrasion Resistance Performance Excellent Insulation Performance All type of Size 180,360, 450, 600mm etc
Product name 99.7 high purity Alumina ceramic Polishing Lapping Discs
Material 99.7% alumina
Normal Size D180, 360, 450, 600mm, customized size accepted.
Color Ivory
Application Wafer and Sapphire CMP process in semi-conductive industry
Min.Order 1Pic

Chemical / physical Information

Unit 99.7 Alumina Ceramics
General Properties Al2O3 content wt% 99.7-99.9
Density gm/cc 3.94-3.97
Color - Ivory
Water absorption % 0
Mechanical Properties Flexural Strength(MOR) 20 ºC Mpa(psix10^3) 440-550
Elastic Modulus 20ºC GPa (psix10^6) 375
Vickers Hardness Gpa(kg/mm2) R45N >=17
Bending Strength Gpa 390
Tensile Strength 25ºC MPa(psix10^3) 248
Fracture Toughness (K I c) Mpa* m^1/2 4-5
Thermal Properities Thermal conductivity(20ºC) W/mk 30
Coefficient of Thermal expansion(25-1000ºC) 1x 10^-6/ºC 7.6
Thermal Shock Resistance ºC 200
Maximum use temperature ºC 1700
Electrical Properities Dielectric Strength (1MHz) ac-kv/mm(ac v/mil) 8.7
Dielectric Constant(1 MHz) 25ºC 9.7
Volume Resistivity ohm-cm (25ºC) >10^14
ohm-cm (500ºC) 2x10^12
ohm-cm (1000ºC) 2x10^7

Service

We accept custom orders. If you want to know more product information, please feel free contact us and we'll afford you the most suitable product and best service!

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